ULVAC single-phase multi oil rotary vacuum pump

[Features]● Equipped with gas ballast valve, forced lubrication mechanism, and oil backflow prevention mechanism. ●The gas ballast valve removes moisture from the sucked gas and prevents it from dissolving in the pump oil. ●It is a high-end model that further pursues the performance of the G series and enhances quietness, safety and functionality. ●Equipped with a multi-range universal motor, it can handle any voltage in the world. ●CE marking self-declared product, TUV, cTUVus certified product.

[Applications] ● For physics and chemistry experiments, analysis equipment, and laser application equipment. ●Vacuum exhaust system, electron microscope back. ●Semiconductor manufacturing equipment, sputtering equipment, vacuum deposition equipment. ●Vacuum dryer, Freeze dryer.

[Specifications] ● Exhaust speed (L/min) 50/60Hz: 200/240 ● Ultimate pressure (Pa): 0.67 ● Intake port size: KF-25 ● Power supply (V): Single-phase multi ● Noise level (dB): - -Oil used: SMR-100 -Width x total length x height (mm): 170 x 515.5 x 249.5 -Dimensions (mm): 170 x 515.5 x 249.5

[Specification 2] ● Supports different voltages from one unit

[Material/Finish]
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[Set contents/accessories]
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[Caution] ● Since it has a high vacuum range (10 [[-1]] Pa level), please use joints, containers, etc. that can be used sufficiently in a high vacuum.