ULVAC three-phase 200V oil rotary vacuum pump

[Features] ● Chemical type vacuum pump with surface treatment applied to gas contact surfaces. ●Durable pump ideal for vacuuming special gases and solvents used in the chemical and semiconductor industries.

[Use] ●Chemical equipment such as concentrators. ●Semiconductor manufacturing equipment. ●Pharmaceutical machinery. ●Drying after chemical treatment. ●Vacuum dryer, connected dryer

[Specifications] ● Exhaust speed (L/min) 50/60Hz: 200/240 ● Ultimate pressure (Pa): 0.67 ● Intake port diameter: KF-25 ● Power supply (V): Three-phase 200 ● Noise level (dB): - - With thermal protector: ○ - Used oil: SO-M - Overall width x total length x overall height (mm): 170.0 x 509.5 x 241.1 - Dimensions (mm): 170.0 x 509.5 x 241.1

[Specification 2] ● 2-stage exhaust system ● Compatible with different voltages from one unit ● Chemical type

[Material/Finish]
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[Set contents/accessories]
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[Caution] ● Use synthetic oil (SO-M) for the vacuum pump oil. ●Consult us in advance if special gases or liquids are to be inhaled. ● Not suitable for continuous operation near atmospheric pressure. ●Check the material and corrosion resistance when selecting optional parts when corrosive gas is sucked.