ULVAC single-phase 100V DAIA type dry vacuum pump, pumping speed 6/7

[Features]
This is a vacuum pump that uses the reciprocating motion of a thin rubber membrane (DAIA) to evacuate air.
This is a dry vacuum pump that does not use oil or water in the gas contact parts. A thermal protector is built in for safety.
The simple structure makes maintenance easy.

[Applications]
Suction transport, suction fixation, vacuum tweezers.
Analytical equipment, scientific and chemical equipment.
Semiconductor inspection equipment.
Device assembly.
Automatic machines, packaging machines.

【specification】
Exhaust speed (L/min) 50/60Hz: 6/7
Ultimate pressure (Pa): 6.65 x 103
Intake diameter (mm): Rc1/8
Power supply (V): Single phase 100
Overall width (mm): 91
Total length (mm): 163
Overall height (mm): 100.6
Dimensions (mm): 91 x 163 x 100.6
Power supply: Single phase 100V

[Specification 2]
Supports different voltages from a single unit (excluding DAL-181D/DAL-361S)
For low speed and low pressure

[Material/Finish]
-

[Set contents/accessories]
-

【Note】
If you restart the pump after it has stopped, it may not restart if there is a vacuum inside the pump. The pump will restart if the inside of the pump is returned to atmospheric pressure.
If the intake gas contains moisture, debris, corrosive gases, etc., it is necessary to remove them.