ULVAC three-phase 200V DAIA type dry vacuum pump

[Features]
●A vacuum pump that exhausts air using the reciprocating motion of a rubber thin film (DAIA).
●This is a dry vacuum pump that does not use oil or water in the wetted parts. Built-in thermal protector for safety.
●Simple structure and easy maintenance.

[Use]
● Adsorption transfer, adsorption fixation, vacuum tweezers.
● Analytical equipment, physics and chemistry equipment.
●Semiconductor inspection equipment.
● Device assembly.
●Automatic and packaging machines.

【specification】
●Exhaust speed (L/min) 50/60Hz: 180/210
Ultimate pressure (Pa): 3.3 x 10 [[cubic]]
- Intake diameter (mm): 21
Power supply (V): three-phase 200
●Noise level (dB):-
- Overall width x total length x total height (mm): 388 x 523.6 x 274
-Dimensions (mm): 388 x 523.6 x 274

[Specification 2]
Ultimate pressure (KPa): 3.3
-Intake and exhaust pipe diameter (mm): ODφ21 x IDφ15 (G1/2)
-Maximum dimensions (mm): 388 (W) x 523.6 (L) x 274 (H)

[Material/Finish]
-

[Set contents/accessories]
-

【Note】
●When restarting the pump after it has stopped, it may not restart if the inside of the pump is in a vacuum state. If the inside of the pump is returned to atmospheric pressure, it will restart.
●When moisture, dust, corrosive gas, etc. are mixed in the intake gas, it is necessary to remove them.